CVDdiamond
Microwave Plasma CVD ECR Plasma Process Systems Hot Filament CVD Raman
Large Area (12" x 12")
Diamond Coatings by
Hot Filament CVD
Model 600
Diamond Deposition Reactor
Computer-controlled deposition—
consistent film thickness and grain size for production; flexible control of deposition for R&D
Excellent film uniformity—
±20% total, tool-to-tool and run-to-run, ±10% within a tool
Large usable deposition area—
144 square inches (93,000 square mm)
High production capacity—
for example, 70,000 carbide cutting inserts per year
Low cost operation—
less than 0.4 kWh power consumption per cubic mm of diamond deposited
Data collection and analysis—
SPC control and links to multiple network protocols for remote monitoring and analysis
Safe—
no operator exposure to aromatic hydrocarbons; personnel and equipment protected by hardware and software interlocks
Reliable—
MTBF greater than 500 hours
Proprietary technology—
protected by U.S patents no. 5,833,753 and 5,997,650
Model 600 Data Sheet (858KB)
 
High Throughput at Low Cost. The typical deposition area is 12" x 12" (144 square inches or 93,000 square mm). 1µm/hr average growth rate and quick turnaround between runs, coupled with efficient use of power and gasses and the ability to run unattended for long periods, provides high throughput at low cost. For example, the Model 600 can coat more than 70,000 SPG-322 inserts per year. Its economical operation and 30 kW power consumption enable the Model 600 to produce the lowest cost diamond coatings on the market. The Model 600 offers options for Planar Deposition (illustrated at left) and Three Dimensional Deposition (right). large quantities of tools to be coated per deposition cycle.


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