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(1) Microwave
plasma CVD applications
(i) Growth
of various materials
Diamond and Related Materials (Homoepitaxial and Heteroepitaxial
diamond, Nanocrystalline diamond, Diamond Like Carbon, etc.), Carbon
Nanotubes, Carbon Nitride, Boron Nitride, Silicon Nitride, Gallium
Nitride, Gallium Oxide Whiskers & Nanowires, Silicon and Silicon
Nanowires, Silicon Oxide, SiC, Zirconia etc.
(ii) Nitriding
(iii) Etching/Cleaning
(iv) Characterization of microwave plasma
(2)
CVD grown material applications
Diamond
Film and Devices
(3) Recently
proposed new applications by our R&D team member
Linking carbon films, grown by Seki (former ASTeX) microwave plasma
CVD grown, to new areas (x-ray optics, particle physics, etc.).
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